Multilayered skyscraper microchips fabricated by hybrid "all-in-one" femtosecond laser processing. [electronic resource]

By: Contributor(s): Publication details: Microsystems & nanoengineering 2019Description: 17 p. digitalISSN:
  • 2055-7434
Online resources: In: Microsystems & nanoengineering vol. 5
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Publication Type: Journal Article

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