Silicon nano-mechanical resonators fabricated by using tip-based nanofabrication. [electronic resource]

By: Contributor(s): Producer: 20150330Description: 275301 p. digitalISSN:
  • 1361-6528
Online resources: In: Nanotechnology vol. 25
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Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S.

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