Silicon nano-mechanical resonators fabricated by using tip-based nanofabrication.
Hu, Huan
Silicon nano-mechanical resonators fabricated by using tip-based nanofabrication. [electronic resource] - Nanotechnology Jul 2014 - 275301 p. digital
Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S.
1361-6528
10.1088/0957-4484/25/27/275301 doi
Silicon nano-mechanical resonators fabricated by using tip-based nanofabrication. [electronic resource] - Nanotechnology Jul 2014 - 275301 p. digital
Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S.
1361-6528
10.1088/0957-4484/25/27/275301 doi