Online tuning of impedance matching circuit for long pulse inductively coupled plasma source operation--an alternate approach. [electronic resource]

By: Contributor(s): Producer: 20141010Description: 013510 p. digitalISSN:
  • 1089-7623
Online resources: In: The Review of scientific instruments vol. 85
Tags from this library: No tags from this library for this title. Log in to add tags.
Star ratings
    Average rating: 0.0 (0 votes)
No physical items for this record

Publication Type: Journal Article

There are no comments on this title.

to post a comment.