Online tuning of impedance matching circuit for long pulse inductively coupled plasma source operation--an alternate approach.

Sudhir, Dass

Online tuning of impedance matching circuit for long pulse inductively coupled plasma source operation--an alternate approach. [electronic resource] - The Review of scientific instruments Jan 2014 - 013510 p. digital

Publication Type: Journal Article

1089-7623

10.1063/1.4863098 doi