Monomeric malonate precursors for the MOCVD of HfO2 and ZrO2 thin films. [electronic resource]

By: Contributor(s): Producer: 20090505Description: 654-63 p. digitalISSN:
  • 1477-9226
Online resources: In: Dalton transactions (Cambridge, England : 2003) no. 4
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Publication Type: Journal Article

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