Monomeric malonate precursors for the MOCVD of HfO2 and ZrO2 thin films.
Pothiraja, Ramasamy
Monomeric malonate precursors for the MOCVD of HfO2 and ZrO2 thin films. [electronic resource] - Dalton transactions (Cambridge, England : 2003) Jan 2009 - 654-63 p. digital
Publication Type: Journal Article
1477-9226
10.1039/b810528f doi
Monomeric malonate precursors for the MOCVD of HfO2 and ZrO2 thin films. [electronic resource] - Dalton transactions (Cambridge, England : 2003) Jan 2009 - 654-63 p. digital
Publication Type: Journal Article
1477-9226
10.1039/b810528f doi