Recovery of Multilayer-Coated Zerodur and ULE Optics for Extreme-Ultraviolet Lithography by Recoating, Reactive-Ion Etching, and Wet-Chemical Processes. [electronic resource]

By: Contributor(s): Producer: 20121002Description: 62-70 p. digitalISSN:
  • 1559-128X
Online resources: In: Applied optics vol. 40
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Publication Type: Journal Article

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