Recovery of Multilayer-Coated Zerodur and ULE Optics for Extreme-Ultraviolet Lithography by Recoating, Reactive-Ion Etching, and Wet-Chemical Processes.
Mirkarimi, P B
Recovery of Multilayer-Coated Zerodur and ULE Optics for Extreme-Ultraviolet Lithography by Recoating, Reactive-Ion Etching, and Wet-Chemical Processes. [electronic resource] - Applied optics Jan 2001 - 62-70 p. digital
Publication Type: Journal Article
1559-128X
10.1364/ao.40.000062 doi
Recovery of Multilayer-Coated Zerodur and ULE Optics for Extreme-Ultraviolet Lithography by Recoating, Reactive-Ion Etching, and Wet-Chemical Processes. [electronic resource] - Applied optics Jan 2001 - 62-70 p. digital
Publication Type: Journal Article
1559-128X
10.1364/ao.40.000062 doi