Detailed TIMS study of Ar/C(2)H(2) expanding thermal plasma: identification of a-C:H film growth precursors. [electronic resource]

By: Contributor(s): Producer: 20070724Description: 10153-67 p. digitalISSN:
  • 1089-5639
Online resources: In: The journal of physical chemistry. A vol. 109
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Publication Type: Journal Article

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