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Detailed TIMS study of Ar/C(2)H(2) expanding thermal plasma: identification of a-C:H film growth precursors.

Benedikt, J

Detailed TIMS study of Ar/C(2)H(2) expanding thermal plasma: identification of a-C:H film growth precursors. [electronic resource] - The journal of physical chemistry. A Nov 2005 - 10153-67 p. digital

Publication Type: Journal Article

ISSN: 1089-5639

Standard No.: 10.1021/jp052623a doi

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