Post-Cleaning Effect on a HfO2 Gate Stack Using a NF3/NH3 Plasma. (Record no. 26290121)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00974 a2200277 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20250517110644.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 201608s 0 0 eng d |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 1533-4899 |
| 024 7# - OTHER STANDARD IDENTIFIER | |
| Standard number or code | 10.1166/jnn.2016.12257 |
| Source of number or code | doi |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | NLM |
| Language of cataloging | eng |
| Transcribing agency | NLM |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Lee, Min-Seon |
| 264 #0 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Date of production, publication, distribution, manufacture, or copyright notice | 20160811 |
| 245 00 - TITLE STATEMENT | |
| Title | Post-Cleaning Effect on a HfO2 Gate Stack Using a NF3/NH3 Plasma. |
| Medium | [electronic resource] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | Journal of nanoscience and nanotechnology |
| Date of publication, distribution, etc. | May 2016 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 4808-13 p. |
| Other physical details | digital |
| 500 ## - GENERAL NOTE | |
| General note | Publication Type: Journal Article; Research Support, Non-U.S. Gov't |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Oh, Hoon-Jung |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Lee, Joo-Hee |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Lee, In-Geun |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Shin, Woo-Gon |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kim, Kyu-Dong |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Park, Jin-Gu |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Ko, Dae-Hong |
| 773 0# - HOST ITEM ENTRY | |
| Title | Journal of nanoscience and nanotechnology |
| Related parts | vol. 16 |
| -- | no. 5 |
| -- | p. 4808-13 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | <a href="https://doi.org/10.1166/jnn.2016.12257">https://doi.org/10.1166/jnn.2016.12257</a> |
| Public note | Available from publisher's website |
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