Numerical analysis of the sub-wavelength fabrication of MTMO grayscale photomasks by direct laser writing. (Record no. 24068796)

MARC details
000 -LEADER
fixed length control field 00891 a2200253 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20250516225147.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 201504s 0 0 eng d
022 ## - INTERNATIONAL STANDARD SERIAL NUMBER
International Standard Serial Number 1094-4087
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.1364/OE.22.016889
Source of number or code doi
040 ## - CATALOGING SOURCE
Original cataloging agency NLM
Language of cataloging eng
Transcribing agency NLM
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Xia, Feng
264 #0 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE
Date of production, publication, distribution, manufacture, or copyright notice 20150403
245 00 - TITLE STATEMENT
Title Numerical analysis of the sub-wavelength fabrication of MTMO grayscale photomasks by direct laser writing.
Medium [electronic resource]
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Name of publisher, distributor, etc. Optics express
Date of publication, distribution, etc. Jul 2014
300 ## - PHYSICAL DESCRIPTION
Extent 16889-96 p.
Other physical details digital
500 ## - GENERAL NOTE
General note Publication Type: Journal Article; Research Support, Non-U.S. Gov't
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Zhang, Xinzheng
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Wang, Meng
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Yi, Sanming
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Liu, Qian
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Xu, Jingjun
773 0# - HOST ITEM ENTRY
Title Optics express
Related parts vol. 22
-- no. 14
-- p. 16889-96
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="https://doi.org/10.1364/OE.22.016889">https://doi.org/10.1364/OE.22.016889</a>
Public note Available from publisher's website

No items available.