Numerical analysis of the sub-wavelength fabrication of MTMO grayscale photomasks by direct laser writing.
Xia, Feng
Numerical analysis of the sub-wavelength fabrication of MTMO grayscale photomasks by direct laser writing. [electronic resource] - Optics express Jul 2014 - 16889-96 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1094-4087
10.1364/OE.22.016889 doi
Numerical analysis of the sub-wavelength fabrication of MTMO grayscale photomasks by direct laser writing. [electronic resource] - Optics express Jul 2014 - 16889-96 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1094-4087
10.1364/OE.22.016889 doi