Resolution limits of secondary electron dopant contrast in helium ion and scanning electron microscopy.

Jepson, Mark

Resolution limits of secondary electron dopant contrast in helium ion and scanning electron microscopy. [electronic resource] - Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada Aug 2011 - 637-42 p. digital

Publication Type: Journal Article; Research Support, Non-U.S. Gov't

1435-8115

10.1017/S1431927611000365 doi