Effect of the working gas of the ion-assisted source on the optical and mechanical properties of SiO2 films deposited by dual ion beam sputtering with Si and SiO2 as the starting materials.
Wu, Jean-Yee
Effect of the working gas of the ion-assisted source on the optical and mechanical properties of SiO2 films deposited by dual ion beam sputtering with Si and SiO2 as the starting materials. [electronic resource] - Applied optics May 2006 - 3510-5 p. digital
Publication Type: Journal Article
1559-128X
10.1364/ao.45.003510 doi
Effect of the working gas of the ion-assisted source on the optical and mechanical properties of SiO2 films deposited by dual ion beam sputtering with Si and SiO2 as the starting materials. [electronic resource] - Applied optics May 2006 - 3510-5 p. digital
Publication Type: Journal Article
1559-128X
10.1364/ao.45.003510 doi