000 00722 a2200169 4500
005 20250513161528.0
008 ####s 0 0 eng d
022 _a1050-2947
024 7 _a10.1103/physreva.41.4058
_2doi
040 _aNLM
_beng
_cNLM
245 0 0 _aEnergy deposition of energetic silicon atoms within a silicon lattice.
_h[electronic resource]
260 _bPhysical review. A, Atomic, molecular, and optical physics
_cApr 1990
300 _a4058-4061 p.
_bdigital
500 _aPublication Type: Journal Article
773 0 _tPhysical review. A, Atomic, molecular, and optical physics
_gvol. 41
_gno. 7
_gp. 4058-4061
856 4 0 _uhttps://doi.org/10.1103/physreva.41.4058
_zAvailable from publisher's website
999 _c9865321
_d9865321