| 000 | 00822 a2200241 4500 | ||
|---|---|---|---|
| 005 | 20250518073514.0 | ||
| 008 | ####s 0 0 eng d | ||
| 022 | _a2470-1343 | ||
| 024 | 7 |
_a10.1021/acsomega.9b02452 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
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| 100 | 1 | _aWang, Yuancheng | |
| 245 | 0 | 0 |
_aRadio Frequency Plasma-Enhanced Reactive Magnetron Sputtering Deposition of α-SiN _h[electronic resource] |
| 260 |
_bACS omega _cDec 2019 |
||
| 300 |
_a20205-20211 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aQu, Hongwei | |
| 700 | 1 | _aWang, Yufei | |
| 700 | 1 | _aDong, Fengxin | |
| 700 | 1 | _aChen, Zhonghao | |
| 700 | 1 | _aZheng, Wanhua | |
| 773 | 0 |
_tACS omega _gvol. 4 _gno. 23 _gp. 20205-20211 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1021/acsomega.9b02452 _zAvailable from publisher's website |
| 999 |
_c30399173 _d30399173 |
||