000 00952 a2200277 4500
005 20250518065329.0
008 ####s 0 0 eng d
022 _a1936-086X
024 7 _a10.1021/acsnano.9b05740
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aMäkilä, Ermei
245 0 0 _aHierarchical Nanostructuring of Porous Silicon with Electrochemical and Regenerative Electroless Etching.
_h[electronic resource]
260 _bACS nano
_cNov 2019
300 _a13056-13064 p.
_bdigital
500 _aPublication Type: Journal Article
700 1 _aAnton Willmore, Anne-Mari
700 1 _aYu, Haibo
700 1 _aIrri, Marianna
700 1 _aAindow, Mark
700 1 _aTeesalu, Tambet
700 1 _aCanham, Leigh T
700 1 _aKolasinski, Kurt W
700 1 _aSalonen, Jarno
773 0 _tACS nano
_gvol. 13
_gno. 11
_gp. 13056-13064
856 4 0 _uhttps://doi.org/10.1021/acsnano.9b05740
_zAvailable from publisher's website
999 _c30257453
_d30257453