| 000 | 01055 a2200229 4500 | ||
|---|---|---|---|
| 005 | 20250518041333.0 | ||
| 008 | ####s 0 0 eng d | ||
| 022 | _a1435-8115 | ||
| 024 | 7 |
_a10.1017/S143192761900062X _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aArat, Kerim Tugrul | |
| 245 | 0 | 0 |
_aEstimating Step Heights from Top-Down SEM Images. _h[electronic resource] |
| 260 |
_bMicroscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada _cAug 2019 |
||
| 300 |
_a903-911 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aBolten, Jens | |
| 700 | 1 | _aZonnevylle, Aernout Christiaan | |
| 700 | 1 | _aKruit, Pieter | |
| 700 | 1 | _aHagen, Cornelis Wouter | |
| 773 | 0 |
_tMicroscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada _gvol. 25 _gno. 4 _gp. 903-911 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1017/S143192761900062X _zAvailable from publisher's website |
| 999 |
_c29710527 _d29710527 |
||