| 000 | 00983 a2200301 4500 | ||
|---|---|---|---|
| 005 | 20250518040156.0 | ||
| 008 | ####s 0 0 eng d | ||
| 022 | _a2055-7434 | ||
| 024 | 7 |
_a10.1038/s41378-019-0056-3 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aWang, Chaowei | |
| 245 | 0 | 0 |
_aMultilayered skyscraper microchips fabricated by hybrid "all-in-one" femtosecond laser processing. _h[electronic resource] |
| 260 |
_bMicrosystems & nanoengineering _c2019 |
||
| 300 |
_a17 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aYang, Liang | |
| 700 | 1 | _aZhang, Chenchu | |
| 700 | 1 | _aRao, Shenglong | |
| 700 | 1 | _aWang, Yulong | |
| 700 | 1 | _aWu, Sizhu | |
| 700 | 1 | _aLi, Jiawen | |
| 700 | 1 | _aHu, Yanlei | |
| 700 | 1 | _aWu, Dong | |
| 700 | 1 | _aChu, Jiaru | |
| 700 | 1 | _aSugioka, Koji | |
| 773 | 0 |
_tMicrosystems & nanoengineering _gvol. 5 _gp. 17 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1038/s41378-019-0056-3 _zAvailable from publisher's website |
| 999 |
_c29671136 _d29671136 |
||