| 000 | 00818 a2200241 4500 | ||
|---|---|---|---|
| 005 | 20250518034300.0 | ||
| 008 | ####s 0 0 eng d | ||
| 022 | _a2072-666X | ||
| 024 | 7 |
_a10.3390/mi10040258 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aMcAllister, Jeffrey | |
| 245 | 0 | 0 |
_aEffect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO _h[electronic resource] |
| 260 |
_bMicromachines _cApr 2019 |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aStuffle, Calliandra | |
| 700 | 1 | _aSampurno, Yasa | |
| 700 | 1 | _aHetherington, Dale | |
| 700 | 1 | _aSierra Suarez, Jon | |
| 700 | 1 | _aBorucki, Leonard | |
| 700 | 1 | _aPhilipossian, Ara | |
| 773 | 0 |
_tMicromachines _gvol. 10 _gno. 4 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.3390/mi10040258 _zAvailable from publisher's website |
| 999 |
_c29606658 _d29606658 |
||