000 00897 a2200241 4500
005 20250518030141.0
264 0 _c20200323
008 202003s 0 0 eng d
022 _a2045-2322
024 7 _a10.1038/s41598-019-40749-6
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aRaele, Marcus Paulo
245 0 0 _aFocus Tracking System for Femtosecond Laser Machining using Low Coherence Interferometry.
_h[electronic resource]
260 _bScientific reports
_c03 2019
300 _a4167 p.
_bdigital
500 _aPublication Type: Journal Article; Research Support, Non-U.S. Gov't
700 1 _aDe Pretto, Lucas Ramos
700 1 _ade Rossi, Wagner
700 1 _aVieira, Nilson Dias
700 1 _aSamad, Ricardo Elgul
773 0 _tScientific reports
_gvol. 9
_gno. 1
_gp. 4167
856 4 0 _uhttps://doi.org/10.1038/s41598-019-40749-6
_zAvailable from publisher's website
999 _c29468961
_d29468961