| 000 | 00779 a2200217 4500 | ||
|---|---|---|---|
| 005 | 20250518024609.0 | ||
| 008 | ####s 0 0 eng d | ||
| 022 | _a2045-2322 | ||
| 024 | 7 |
_a10.1038/s41598-019-38753-x _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aRollo, Serena | |
| 245 | 0 | 0 |
_aSingle step fabrication of Silicon resistors on SOI substrate used as Thermistors. _h[electronic resource] |
| 260 |
_bScientific reports _cFeb 2019 |
||
| 300 |
_a2835 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aRani, Dipti | |
| 700 | 1 | _aOlthuis, Wouter | |
| 700 | 1 | _aPascual García, César | |
| 773 | 0 |
_tScientific reports _gvol. 9 _gno. 1 _gp. 2835 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1038/s41598-019-38753-x _zAvailable from publisher's website |
| 999 |
_c29416479 _d29416479 |
||