| 000 | 00755 a2200217 4500 | ||
|---|---|---|---|
| 005 | 20250518022000.0 | ||
| 008 | ####s 0 0 eng d | ||
| 022 | _a2072-666X | ||
| 024 | 7 |
_a10.3390/mi9110542 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aVazquez Bengochea, Leticia | |
| 245 | 0 | 0 |
_aCharacterization of CMP Slurries Using Densitometry and Refractive Index Measurements. _h[electronic resource] |
| 260 |
_bMicromachines _cOct 2018 |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aSampurno, Yasa | |
| 700 | 1 | _aKavaljer, Marcus | |
| 700 | 1 | _aJohnston, Rob | |
| 700 | 1 | _aPhilipossian, Ara | |
| 773 | 0 |
_tMicromachines _gvol. 9 _gno. 11 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.3390/mi9110542 _zAvailable from publisher's website |
| 999 |
_c29324760 _d29324760 |
||