| 000 | 00686 a2200193 4500 | ||
|---|---|---|---|
| 005 | 20250518011944.0 | ||
| 008 | ####s 0 0 eng d | ||
| 022 | _a2072-666X | ||
| 024 | 7 |
_a10.3390/mi9120631 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aKlemenschits, Xaver | |
| 245 | 0 | 0 |
_aModeling of Gate Stack Patterning for Advanced Technology Nodes: A Review. _h[electronic resource] |
| 260 |
_bMicromachines _cNov 2018 |
||
| 500 | _aPublication Type: Journal Article; Review | ||
| 700 | 1 | _aSelberherr, Siegfried | |
| 700 | 1 | _aFilipovic, Lado | |
| 773 | 0 |
_tMicromachines _gvol. 9 _gno. 12 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.3390/mi9120631 _zAvailable from publisher's website |
| 999 |
_c29115005 _d29115005 |
||