000 00876 a2200229 4500
005 20250518011619.0
008 ####s 0 0 eng d
022 _a1533-4880
024 7 _a10.1166/jnn.2019.15996
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aWu, Chien-Hung
245 0 0 _aThe Effect of Microwave Annealing of Reliability Characteristics on Amorphous IGZO Thin Film Transistors.
_h[electronic resource]
260 _bJournal of nanoscience and nanotechnology
_cApr 2019
300 _a2189-2192 p.
_bdigital
500 _aPublication Type: Journal Article
700 1 _aChang, Kow-Ming
700 1 _aChen, Yi-Ming
700 1 _aZhang, Yu-Xin
700 1 _aCheng, Chia-Yao
773 0 _tJournal of nanoscience and nanotechnology
_gvol. 19
_gno. 4
_gp. 2189-2192
856 4 0 _uhttps://doi.org/10.1166/jnn.2019.15996
_zAvailable from publisher's website
999 _c29101078
_d29101078