| 000 | 00783 a2200241 4500 | ||
|---|---|---|---|
| 005 | 20250518005359.0 | ||
| 008 | ####s 0 0 eng d | ||
| 022 | _a2072-666X | ||
| 024 | 7 |
_a10.3390/mi7010002 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aCao, Binh Xuan | |
| 245 | 0 | 0 |
_aDesign and Performance of a Focus-Detection System for Use in Laser Micromachining. _h[electronic resource] |
| 260 |
_bMicromachines _cJan 2016 |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aBae, Munju | |
| 700 | 1 | _aSohn, Hyonkee | |
| 700 | 1 | _aChoi, Jiyeon | |
| 700 | 1 | _aKim, Youngduk | |
| 700 | 1 | _aKim, Jeng-O | |
| 700 | 1 | _aNoh, Jiwhan | |
| 773 | 0 |
_tMicromachines _gvol. 7 _gno. 1 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.3390/mi7010002 _zAvailable from publisher's website |
| 999 |
_c29023243 _d29023243 |
||