000 00834 a2200253 4500
005 20250518005216.0
008 ####s 0 0 eng d
022 _a2072-666X
024 7 _a10.3390/mi8100300
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aLu, Xizhao
245 0 0 _aLaser-Induced-Plasma-Assisted Ablation and Metallization on C-Plane Single Crystal Sapphire (c-Al₂O₃).
_h[electronic resource]
260 _bMicromachines
_cOct 2017
500 _aPublication Type: Journal Article
700 1 _aJiang, Feng
700 1 _aLei, Tingping
700 1 _aZhou, Rui
700 1 _aZhang, Chentao
700 1 _aZheng, Gaofeng
700 1 _aWen, Qiuling
700 1 _aChen, Zhong
773 0 _tMicromachines
_gvol. 8
_gno. 10
856 4 0 _uhttps://doi.org/10.3390/mi8100300
_zAvailable from publisher's website
999 _c29016773
_d29016773