| 000 | 00797 a2200229 4500 | ||
|---|---|---|---|
| 005 | 20250517213602.0 | ||
| 264 | 0 | _c20180613 | |
| 008 | 201806s 0 0 eng d | ||
| 022 | _a1094-4087 | ||
| 024 | 7 |
_a10.1364/OE.26.011503 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aBernasconi, Johana | |
| 245 | 0 | 0 |
_aHigh-power modular LED-based illumination systems for mask-aligner lithography. _h[electronic resource] |
| 260 |
_bOptics express _cApr 2018 |
||
| 300 |
_a11503-11512 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aScharf, Toralf | |
| 700 | 1 | _aVogler, Uwe | |
| 700 | 1 | _aHerzig, Hans Peter | |
| 773 | 0 |
_tOptics express _gvol. 26 _gno. 9 _gp. 11503-11512 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1364/OE.26.011503 _zAvailable from publisher's website |
| 999 |
_c28346877 _d28346877 |
||