000 00806 a2200241 4500
005 20250517193219.0
264 0 _c20180222
008 201802s 0 0 eng d
022 _a1424-8220
024 7 _a10.3390/s17122842
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aCao, Binh Xuan
245 0 0 _aHigh-Speed Focus Inspection System Using a Position-Sensitive Detector.
_h[electronic resource]
260 _bSensors (Basel, Switzerland)
_cDec 2017
500 _aPublication Type: Journal Article
700 1 _aHoang, Phuong Le
700 1 _aAhn, Sanghoon
700 1 _aKang, Heeshin
700 1 _aKim, Jengo
700 1 _aNoh, Jiwhan
773 0 _tSensors (Basel, Switzerland)
_gvol. 17
_gno. 12
856 4 0 _uhttps://doi.org/10.3390/s17122842
_zAvailable from publisher's website
999 _c27939782
_d27939782