| 000 | 00846 a2200229 4500 | ||
|---|---|---|---|
| 005 | 20250517170937.0 | ||
| 264 | 0 | _c20180730 | |
| 008 | 201807s 0 0 eng d | ||
| 022 | _a1944-8252 | ||
| 024 | 7 |
_a10.1021/acsami.7b07811 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aZyulkov, Ivan | |
| 245 | 0 | 0 |
_aSelective Ru ALD as a Catalyst for Sub-Seven-Nanometer Bottom-Up Metal Interconnects. _h[electronic resource] |
| 260 |
_bACS applied materials & interfaces _cSep 2017 |
||
| 300 |
_a31031-31041 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aKrishtab, Mikhail | |
| 700 | 1 | _aDe Gendt, Stefan | |
| 700 | 1 | _aArmini, Silvia | |
| 773 | 0 |
_tACS applied materials & interfaces _gvol. 9 _gno. 36 _gp. 31031-31041 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1021/acsami.7b07811 _zAvailable from publisher's website |
| 999 |
_c27477764 _d27477764 |
||