| 000 | 01005 a2200289 4500 | ||
|---|---|---|---|
| 005 | 20250517160756.0 | ||
| 264 | 0 | _c20181214 | |
| 008 | 201812s 0 0 eng d | ||
| 022 | _a2045-2322 | ||
| 024 | 7 |
_a10.1038/s41598-017-03678-w _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aBaudet, E | |
| 245 | 0 | 0 |
_aExperimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors. _h[electronic resource] |
| 260 |
_bScientific reports _c06 2017 |
||
| 300 |
_a3500 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article; Research Support, Non-U.S. Gov't | ||
| 700 | 1 | _aSergent, M | |
| 700 | 1 | _aNěmec, P | |
| 700 | 1 | _aCardinaud, C | |
| 700 | 1 | _aRinnert, E | |
| 700 | 1 | _aMichel, K | |
| 700 | 1 | _aJouany, L | |
| 700 | 1 | _aBureau, B | |
| 700 | 1 | _aNazabal, V | |
| 773 | 0 |
_tScientific reports _gvol. 7 _gno. 1 _gp. 3500 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1038/s41598-017-03678-w _zAvailable from publisher's website |
| 999 |
_c27278505 _d27278505 |
||