000 00761 a2200217 4500
005 20250517120303.0
264 0 _c20180718
008 201807s 0 0 eng d
022 _a1361-6528
024 7 _a10.1088/0957-4484/27/45/454001
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aKopycinska-Mueller, M
245 0 0 _aStudy of mechanical behavior of AFM silicon tips under mechanical load.
_h[electronic resource]
260 _bNanotechnology
_cNov 2016
300 _a454001 p.
_bdigital
500 _aPublication Type: Journal Article
700 1 _aGluch, J
700 1 _aKöhler, B
773 0 _tNanotechnology
_gvol. 27
_gno. 45
_gp. 454001
856 4 0 _uhttps://doi.org/10.1088/0957-4484/27/45/454001
_zAvailable from publisher's website
999 _c26476350
_d26476350