| 000 | 00863 a2200241 4500 | ||
|---|---|---|---|
| 005 | 20250517110118.0 | ||
| 264 | 0 | _c20180129 | |
| 008 | 201801s 0 0 eng d | ||
| 022 | _a1094-4087 | ||
| 024 | 7 |
_a10.1364/OE.24.016574 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aAttota, Ravi Kiran | |
| 245 | 0 | 0 |
_aFeasibility study on 3-D shape analysis of high-aspect-ratio features using through-focus scanning optical microscopy. _h[electronic resource] |
| 260 |
_bOptics express _cJul 2016 |
||
| 300 |
_a16574-85 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aWeck, Peter | |
| 700 | 1 | _aKramar, John A | |
| 700 | 1 | _aBunday, Benjamin | |
| 700 | 1 | _aVartanian, Victor | |
| 773 | 0 |
_tOptics express _gvol. 24 _gno. 15 _gp. 16574-85 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1364/OE.24.016574 _zAvailable from publisher's website |
| 999 |
_c26271377 _d26271377 |
||