000 | 00963 a2200289 4500 | ||
---|---|---|---|
005 | 20250517104627.0 | ||
264 | 0 | _c20180130 | |
008 | 201801s 0 0 eng d | ||
022 | _a1094-4087 | ||
024 | 7 |
_a10.1364/OE.24.012349 _2doi |
|
040 |
_aNLM _beng _cNLM |
||
100 | 1 | _aSeo, Hyunju | |
245 | 0 | 0 |
_aNovel orthogonal velocity polishing tool and its material removal characteristics from CVD SiC mirror surfaces. _h[electronic resource] |
260 |
_bOptics express _cMay 2016 |
||
300 |
_a12349-66 p. _bdigital |
||
500 | _aPublication Type: Journal Article | ||
700 | 1 | _aHan, Jeong-Yeol | |
700 | 1 | _aKim, Sug-Whan | |
700 | 1 | _aSeong, Sehyun | |
700 | 1 | _aYoon, Siyoung | |
700 | 1 | _aLee, Kyoungmuk | |
700 | 1 | _aHong, Jinsuk | |
700 | 1 | _aLee, Haengbok | |
700 | 1 | _aBok, Mingab | |
773 | 0 |
_tOptics express _gvol. 24 _gno. 11 _gp. 12349-66 |
|
856 | 4 | 0 |
_uhttps://doi.org/10.1364/OE.24.012349 _zAvailable from publisher's website |
999 |
_c26221666 _d26221666 |