000 00963 a2200289 4500
005 20250517104627.0
264 0 _c20180130
008 201801s 0 0 eng d
022 _a1094-4087
024 7 _a10.1364/OE.24.012349
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aSeo, Hyunju
245 0 0 _aNovel orthogonal velocity polishing tool and its material removal characteristics from CVD SiC mirror surfaces.
_h[electronic resource]
260 _bOptics express
_cMay 2016
300 _a12349-66 p.
_bdigital
500 _aPublication Type: Journal Article
700 1 _aHan, Jeong-Yeol
700 1 _aKim, Sug-Whan
700 1 _aSeong, Sehyun
700 1 _aYoon, Siyoung
700 1 _aLee, Kyoungmuk
700 1 _aHong, Jinsuk
700 1 _aLee, Haengbok
700 1 _aBok, Mingab
773 0 _tOptics express
_gvol. 24
_gno. 11
_gp. 12349-66
856 4 0 _uhttps://doi.org/10.1364/OE.24.012349
_zAvailable from publisher's website
999 _c26221666
_d26221666