000 01128 a2200325 4500
005 20250517101749.0
264 0 _c20180718
008 201807s 0 0 eng d
022 _a1936-086X
024 7 _a10.1021/acsnano.6b02648
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aPark, Jun Hong
245 0 0 _aAtomic Layer Deposition of Al2O3 on WSe2 Functionalized by Titanyl Phthalocyanine.
_h[electronic resource]
260 _bACS nano
_c07 2016
300 _a6888-96 p.
_bdigital
500 _aPublication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S.; Research Support, Non-U.S. Gov't
700 1 _aFathipour, Sara
700 1 _aKwak, Iljo
700 1 _aSardashti, Kasra
700 1 _aAhles, Christopher F
700 1 _aWolf, Steven F
700 1 _aEdmonds, Mary
700 1 _aVishwanath, Suresh
700 1 _aXing, Huili Grace
700 1 _aFullerton-Shirey, Susan K
700 1 _aSeabaugh, Alan
700 1 _aKummel, Andrew C
773 0 _tACS nano
_gvol. 10
_gno. 7
_gp. 6888-96
856 4 0 _uhttps://doi.org/10.1021/acsnano.6b02648
_zAvailable from publisher's website
999 _c26127172
_d26127172