000 00927 a2200277 4500
005 20250517101245.0
264 0 _c20170908
008 201709s 0 0 eng d
022 _a1940-087X
024 7 _a10.3791/53868
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aCataldo, Giuseppe
245 0 0 _aFabrication and Characterization of Superconducting Resonators.
_h[electronic resource]
260 _bJournal of visualized experiments : JoVE
_c05 2016
500 _aPublication Type: Journal Article; Video-Audio Media
650 0 4 _aEquipment Design
650 0 4 _aMicrowaves
650 0 4 _aSilicon
700 1 _aBarrentine, Emily M
700 1 _aBrown, Ari D
700 1 _aMoseley, Samuel H
700 1 _aU-Yen, Kongpop
700 1 _aWollack, Edward J
773 0 _tJournal of visualized experiments : JoVE
_gno. 111
856 4 0 _uhttps://doi.org/10.3791/53868
_zAvailable from publisher's website
999 _c26111228
_d26111228