| 000 | 00998 a2200277 4500 | ||
|---|---|---|---|
| 005 | 20250517081212.0 | ||
| 264 | 0 | _c20160620 | |
| 008 | 201606s 0 0 eng d | ||
| 022 | _a1361-6528 | ||
| 024 | 7 |
_a10.1088/0957-4484/27/11/115304 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aRiazanova, A V | |
| 245 | 0 | 0 |
_aGas-assisted electron-beam-induced nanopatterning of high-quality titanium oxide. _h[electronic resource] |
| 260 |
_bNanotechnology _cMar 2016 |
||
| 300 |
_a115304 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, Non-P.H.S. | ||
| 700 | 1 | _aCostanzi, B N | |
| 700 | 1 | _aAristov, A I | |
| 700 | 1 | _aRikers, Y G M | |
| 700 | 1 | _aMulders, J J L | |
| 700 | 1 | _aKabashin, A V | |
| 700 | 1 | _aDahlberg, E Dan | |
| 700 | 1 | _aBelova, L M | |
| 773 | 0 |
_tNanotechnology _gvol. 27 _gno. 11 _gp. 115304 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1088/0957-4484/27/11/115304 _zAvailable from publisher's website |
| 999 |
_c25734371 _d25734371 |
||