000 00866 a2200253 4500
005 20250517062915.0
264 0 _c20160212
008 201602s 0 0 eng d
022 _a1539-4522
024 7 _a10.1364/AO.54.008872
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aO'Connor, Daniel
245 0 0 _aModel-based defect detection on structured surfaces having optically unresolved features.
_h[electronic resource]
260 _bApplied optics
_cOct 2015
300 _a8872-7 p.
_bdigital
500 _aPublication Type: Journal Article
700 1 _aHenning, Andrew J
700 1 _aSherlock, Ben
700 1 _aLeach, Richard K
700 1 _aCoupland, Jeremy
700 1 _aGiusca, Claudiu L
773 0 _tApplied optics
_gvol. 54
_gno. 30
_gp. 8872-7
856 4 0 _uhttps://doi.org/10.1364/AO.54.008872
_zAvailable from publisher's website
999 _c25441620
_d25441620