000 01014 a2200289 4500
005 20250517023850.0
264 0 _c20150825
008 201508s 0 0 eng d
022 _a1361-6528
024 7 _a10.1088/0957-4484/26/16/164001
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aPi, T W
245 0 0 _aIn-situ atomic layer deposition of tri-methylaluminum and water on pristine single-crystal (In)GaAs surfaces: electronic and electric structures.
_h[electronic resource]
260 _bNanotechnology
_cApr 2015
300 _a164001 p.
_bdigital
500 _aPublication Type: Journal Article; Research Support, Non-U.S. Gov't
700 1 _aLin, Y H
700 1 _aFanchiang, Y T
700 1 _aChiang, T H
700 1 _aWei, C H
700 1 _aLin, Y C
700 1 _aWertheim, G K
700 1 _aKwo, J
700 1 _aHong, M
773 0 _tNanotechnology
_gvol. 26
_gno. 16
_gp. 164001
856 4 0 _uhttps://doi.org/10.1088/0957-4484/26/16/164001
_zAvailable from publisher's website
999 _c24756901
_d24756901