| 000 | 00760 a2200205 4500 | ||
|---|---|---|---|
| 005 | 20250517023532.0 | ||
| 264 | 0 | _c20150515 | |
| 008 | 201505s 0 0 eng d | ||
| 022 | _a1424-8220 | ||
| 024 | 7 |
_a10.3390/s150407206 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aFilipovic, Lado | |
| 245 | 0 | 0 |
_aPerformance and stress analysis of metal oxide films for CMOS-integrated gas sensors. _h[electronic resource] |
| 260 |
_bSensors (Basel, Switzerland) _cMar 2015 |
||
| 300 |
_a7206-27 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aSelberherr, Siegfried | |
| 773 | 0 |
_tSensors (Basel, Switzerland) _gvol. 15 _gno. 4 _gp. 7206-27 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.3390/s150407206 _zAvailable from publisher's website |
| 999 |
_c24748409 _d24748409 |
||