000 00816 a2200253 4500
005 20250517002808.0
264 0 _c20150406
008 201504s 0 0 eng d
022 _a1094-4087
024 7 _a10.1364/OE.22.027669
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aHe, Yuhang
245 0 0 _aIterative algorithm for absolute planarity calibration in three-flat test.
_h[electronic resource]
260 _bOptics express
_cNov 2014
300 _a27669-74 p.
_bdigital
500 _aPublication Type: Journal Article
700 1 _aGao, Bo
700 1 _aXu, Kaiyuan
700 1 _aLiu, Ang
700 1 _aLi, Qiang
700 1 _aChai, Liqun
773 0 _tOptics express
_gvol. 22
_gno. 22
_gp. 27669-74
856 4 0 _uhttps://doi.org/10.1364/OE.22.027669
_zAvailable from publisher's website
999 _c24358509
_d24358509