| 000 | 00891 a2200253 4500 | ||
|---|---|---|---|
| 005 | 20250516225147.0 | ||
| 264 | 0 | _c20150403 | |
| 008 | 201504s 0 0 eng d | ||
| 022 | _a1094-4087 | ||
| 024 | 7 |
_a10.1364/OE.22.016889 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aXia, Feng | |
| 245 | 0 | 0 |
_aNumerical analysis of the sub-wavelength fabrication of MTMO grayscale photomasks by direct laser writing. _h[electronic resource] |
| 260 |
_bOptics express _cJul 2014 |
||
| 300 |
_a16889-96 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article; Research Support, Non-U.S. Gov't | ||
| 700 | 1 | _aZhang, Xinzheng | |
| 700 | 1 | _aWang, Meng | |
| 700 | 1 | _aYi, Sanming | |
| 700 | 1 | _aLiu, Qian | |
| 700 | 1 | _aXu, Jingjun | |
| 773 | 0 |
_tOptics express _gvol. 22 _gno. 14 _gp. 16889-96 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1364/OE.22.016889 _zAvailable from publisher's website |
| 999 |
_c24068796 _d24068796 |
||