| 000 | 00875 a2200241 4500 | ||
|---|---|---|---|
| 005 | 20250516221104.0 | ||
| 264 | 0 | _c20150330 | |
| 008 | 201503s 0 0 eng d | ||
| 022 | _a1361-6528 | ||
| 024 | 7 |
_a10.1088/0957-4484/25/27/275301 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aHu, Huan | |
| 245 | 0 | 0 |
_aSilicon nano-mechanical resonators fabricated by using tip-based nanofabrication. _h[electronic resource] |
| 260 |
_bNanotechnology _cJul 2014 |
||
| 300 |
_a275301 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S. | ||
| 700 | 1 | _aCho, Hanna | |
| 700 | 1 | _aSomnath, Suhas | |
| 700 | 1 | _aVakakis, Alexander F | |
| 700 | 1 | _aKing, William P | |
| 773 | 0 |
_tNanotechnology _gvol. 25 _gno. 27 _gp. 275301 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1088/0957-4484/25/27/275301 _zAvailable from publisher's website |
| 999 |
_c23948703 _d23948703 |
||