| 000 | 01026 a2200289 4500 | ||
|---|---|---|---|
| 005 | 20250516202946.0 | ||
| 264 | 0 | _c20141110 | |
| 008 | 201411s 0 0 eng d | ||
| 022 | _a1361-6528 | ||
| 024 | 7 |
_a10.1088/0957-4484/25/15/155301 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aRiazanova, A V | |
| 245 | 0 | 0 |
_aGas-assisted electron-beam-induced nanopatterning of high-quality Si-based insulator. _h[electronic resource] |
| 260 |
_bNanotechnology _cApr 2014 |
||
| 300 |
_a155301 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, Non-P.H.S. | ||
| 700 | 1 | _aCostanzi, B N | |
| 700 | 1 | _aAristov, A | |
| 700 | 1 | _aRikers, Y G M | |
| 700 | 1 | _aStröm, V | |
| 700 | 1 | _aMulders, J J L | |
| 700 | 1 | _aKabashin, A V | |
| 700 | 1 | _aDahlberg, E Dan | |
| 700 | 1 | _aBelova, L M | |
| 773 | 0 |
_tNanotechnology _gvol. 25 _gno. 15 _gp. 155301 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1088/0957-4484/25/15/155301 _zAvailable from publisher's website |
| 999 |
_c23652736 _d23652736 |
||