| 000 | 00914 a2200253 4500 | ||
|---|---|---|---|
| 005 | 20250516195000.0 | ||
| 264 | 0 | _c20141010 | |
| 008 | 201410s 0 0 eng d | ||
| 022 | _a1089-7623 | ||
| 024 | 7 |
_a10.1063/1.4863098 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aSudhir, Dass | |
| 245 | 0 | 0 |
_aOnline tuning of impedance matching circuit for long pulse inductively coupled plasma source operation--an alternate approach. _h[electronic resource] |
| 260 |
_bThe Review of scientific instruments _cJan 2014 |
||
| 300 |
_a013510 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aBandyopadhyay, M | |
| 700 | 1 | _aKraus, W | |
| 700 | 1 | _aGahlaut, A | |
| 700 | 1 | _aBansal, G | |
| 700 | 1 | _aChakraborty, A | |
| 773 | 0 |
_tThe Review of scientific instruments _gvol. 85 _gno. 1 _gp. 013510 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1063/1.4863098 _zAvailable from publisher's website |
| 999 |
_c23536344 _d23536344 |
||