000 00998 a2200289 4500
005 20250516192802.0
264 0 _c20140623
008 201406s 0 0 eng d
022 _a1424-8220
024 7 _a10.3390/s140100877
_2doi
040 _aNLM
_beng
_cNLM
100 1 _aLazar, Josef
245 0 0 _aShort-range six-axis interferometer controlled positioning for scanning probe microscopy.
_h[electronic resource]
260 _bSensors (Basel, Switzerland)
_cJan 2014
300 _a877-86 p.
_bdigital
500 _aPublication Type: Journal Article; Research Support, Non-U.S. Gov't
700 1 _aKlapetek, Petr
700 1 _aValtr, Miroslav
700 1 _aHrabina, Jan
700 1 _aBuchta, Zdenek
700 1 _aCip, Onrej
700 1 _aCizek, Martin
700 1 _aOulehla, Jindrich
700 1 _aSery, Mojmir
773 0 _tSensors (Basel, Switzerland)
_gvol. 14
_gno. 1
_gp. 877-86
856 4 0 _uhttps://doi.org/10.3390/s140100877
_zAvailable from publisher's website
999 _c23474051
_d23474051