| 000 | 00914 a2200253 4500 | ||
|---|---|---|---|
| 005 | 20250516182547.0 | ||
| 264 | 0 | _c20140729 | |
| 008 | 201407s 0 0 eng d | ||
| 022 | _a1477-9234 | ||
| 024 | 7 |
_a10.1039/c3dt52746h _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aGebhard, M | |
| 245 | 0 | 0 |
_aIndium-tris-guanidinates: a promising class of precursors for water assisted atomic layer deposition of In2O3 thin films. _h[electronic resource] |
| 260 |
_bDalton transactions (Cambridge, England : 2003) _cJan 2014 |
||
| 300 |
_a937-40 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aHellwig, M | |
| 700 | 1 | _aParala, H | |
| 700 | 1 | _aXu, K | |
| 700 | 1 | _aWinter, M | |
| 700 | 1 | _aDevi, A | |
| 773 | 0 |
_tDalton transactions (Cambridge, England : 2003) _gvol. 43 _gno. 3 _gp. 937-40 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1039/c3dt52746h _zAvailable from publisher's website |
| 999 |
_c23296756 _d23296756 |
||