| 000 | 00915 a2200265 4500 | ||
|---|---|---|---|
| 005 | 20250516180001.0 | ||
| 264 | 0 | _c20140604 | |
| 008 | 201406s 0 0 eng d | ||
| 022 | _a1089-7623 | ||
| 024 | 7 |
_a10.1063/1.4824119 _2doi |
|
| 040 |
_aNLM _beng _cNLM |
||
| 100 | 1 | _aWang, X | |
| 245 | 0 | 0 |
_aIn-process measuring of the electrical shunt resistance of laser-scribed thin-film stacks by nested circular scribes. _h[electronic resource] |
| 260 |
_bThe Review of scientific instruments _cOct 2013 |
||
| 300 |
_a104704 p. _bdigital |
||
| 500 | _aPublication Type: Journal Article | ||
| 700 | 1 | _aEhrhardt, M | |
| 700 | 1 | _aLorenz, P | |
| 700 | 1 | _aScheit, C | |
| 700 | 1 | _aRagnow, S | |
| 700 | 1 | _aNi, X W | |
| 700 | 1 | _aZimmer, K | |
| 773 | 0 |
_tThe Review of scientific instruments _gvol. 84 _gno. 10 _gp. 104704 |
|
| 856 | 4 | 0 |
_uhttps://doi.org/10.1063/1.4824119 _zAvailable from publisher's website |
| 999 |
_c23221834 _d23221834 |
||